積體電路

●An up-to-date guide to the science and technology of fabricating modern semiconductor ICs, applicable to silicon, compound semiconductor and MEMS devices that ensures students fully understand the field today
●Covers cutting-edge industry-standard technologies, which prepares students for a smooth transition to careers in industry
●Introduces and describes a complete, state-of-the-art CMOS process flow early in the book, which provides students with an immediate overview and broad context to clearly understand technologies introduced in later chapters

James D. Plummer is a Professor of Electrical Engineering at Stanford University. He has over thirty years of experience in teaching semiconductor fabrication and device physics, and has served on the Board of Directors of companies including Intel and Cadence. He is a Member of the National Academy of Engineering and the American Academy of Arts and Sciences, a Fellow of the Institute of Electrical and Electronics Engineers, and a co-author of Silicon VLSI Technology (2000).

Peter B. Griffin is a Senior Research Engineer in Electrical Engineering at Stanford University, and a recognized expert on microfabrication. He has significant hands-on experience in building semiconductor structures, and teaching semiconductor technology courses, at the Stanford Nanofabrication Facility. He is a co-author of Silicon VLSI Technology (2000).

1 - Historical Perspective, Moore’s Law and Future Technology Prospects
2 - Modern Complementary Metal-Oxide–Semiconductor (CMOS) Technology
3 - Semiconductor Materials: Crystal Growth, Wafer Preparation and Material Properties
4 - Semiconductor Manufacturing: Cleanrooms, Wafer Cleaning, Gettering and Chip Yield
5 - Lithography
6 - Semiconductor/Insulator Interfaces
7 - Doping in Semiconductors
8 - Ion Implantation
9 - Etching Technologies and Chemical–Mechanical Polishing
10 - Deposition Technologies
11 - Back-End (Interconnect) Processing Technologies
A.1 - Basics of Semiconductor Materials in Equilibrium
A.2 - Standard Prefixes
A.3 - Useful Conversions
A.4 - Physical Constants
A.5 - Physical Properties of Silicon
A.6 - Properties of Insulators Used in Semiconductor Technology
A.7 - Color Chart for Thermally Grown SiO2 Films Observed Perpendicularly under Daylight Fluorescent Lighting
A.8 - Irvin Curves
A.9 - Error Function
A.10 - List of Important Symbols
A.11 - List of Common Acronyms